Roles of polarization, phase and amplitude in solid immersion lens systems

摘要

By altering the polarization, phase and amplitude at the exit pupil, theintensity distribution near the focal plane of a Solid Immersion Lens(SIL)system can be changed. We have studied how the resolution and focal depthchanges for a few particular cases. It was seen that by impinging radialpolarization on a SIL system, we may obtain a rotational symmetric z-componentof the focused wavefront with spot size similar to that predicted by scalartheory. We also found that it was possible to 'play' with the the contributionsfrom the homogeneous and inhomogeneous waves behind the SIL by changing theamplitude and phase distribution at the aperture.